Wafer-Level Hybrid Integration of Complex Micro-Optical Modules
نویسندگان
چکیده
منابع مشابه
Wafer-Level Hybrid Integration of Complex Micro-Optical Modules
A series of technological steps concentrating around photolithography and UV polymer on glass replication in a mask-aligner that allow for the cost-effective generation of rather complex micro-optical systems on the wafer level are discussed. In this approach, optical functional surfaces are aligned to each other and stacked on top of each other at a desired axial distance. They can consist of ...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2014
ISSN: 2072-666X
DOI: 10.3390/mi5020325